This is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. It is capable of achieving a maximum heating rate of 50 °C/s and a cooling rate of 117 °C/min.
This is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. It is capable of achieving a maximum heating rate of 50 °C/s and a cooling rate of 117 °C/min. The furnace is designed for growing two-dimension and superconducting materials via hybrid physical-chemical vapor deposition (HPCVD), where one heating zone is used as a solid evaporating source and another zone is for vapor deposition. The precision temperature controllers are able to set up programmable heating and cooling profiles with up to 30 temperature segments.
Features
Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
Heated by shortwave IR tube lamps for fast heating
Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD
Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions.
A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional).
Vacuum flanges and the digital vacuum gauge are installed for immediate use.
Application Notes
Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).
Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
Vacuum limit definition for all quartz tube furnaces: Vacuum pressures may only be safely used up to 1000°C
Quartz tubes should be replaced after every 10th use to ensure the best performance.
Samples should never be placed on the tube directly.
After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.
SPECIFICATIONS
Power | AC 208-240V, single-phase, 50/60 Hz MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A). |
Heating Element | 16 pcs 1.5 kW halogen heating tubes, ( OD = 13.3 mm, L= 390 mm ) Standard working life: 2000 hrs. ( depends on the heating rate ) The halogen light tube is consumable. |
Max. Temperature | 900°C max (< 10 minutes ) • 800°C (< 30 minutes ) • 600°C (continuous operation) |
Temperature Accuracy | ± 1°C |
Max. Heating Rate | RT ~ 800ºC: 50 ºC/s • 800 ºC ~ 900 ºC: 10 ºC/s |
Max. Cooling Rate | 60 ºC/min under 200 mTorr environment • 117 ºC/min under atmospheric pressure • 10 °C/min slowest |
Process Tube Size | High purity fused quartz tube • Φ110 (OD) × Φ106 (ID)× 740 (L) mm |
Sliding Rails | Dual sliding rails made of Cr plated steel • Sliding rail length: 400 mm |
Thermocouple | Two K type, 1/4" Dia x 24" length |
Temperature Controller | Two temperature controllers for controlling two zones independently via SCR PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built-in thermocouple broken protection. Over-temperature protection and alarm allow for operation without attendant(s). ± 1 ºC temperature accuracy for dwelling. RS485 Communications Port. |
Vacuum Level | Limited by the vacuum pump ◦ 10^-2 torr can be achieved by the mechanical pump ◦ 10^-4 torr can be reached by molecular pump • The pump is not included. |
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty). |
