The design of atmospheric horizontal diffusion furnace combines the multiple process capability with the needs of a maximum capacity for full production system and high flexibility small scale versions for use in research and pilot production. Diffusion Furnace provides an easy-to-maintain, safe and reliable horizontal furnace platform.
The design of atmospheric horizontal diffusion furnace combines the multiple process capability with the needs of a maximum capacity for full production system and high flexibility small scale versions for use in research and pilot production. Diffusion Furnace provides an easy-to-maintain, safe and reliable horizontal furnace platform.
The STA design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.
Diffusion Furnace Atmospheric Processes
Diffusion (drive-in) high temperature procesess
Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B2H6, POCL₃, PH₃, BN
Various thermal processing e.g. annealing, curing, sintering
Pyrogenic Wet Oxide with External Burning System
Wet Oxide with ultra pure steamer
Dry Oxide
HiPOx (High Pressure Oxide)
DCE or HCl optional for all processes
Features and Benefits of Diffusion Furnace
State of the art modular control system, inhouse designed, highly tailored and inhouse manufactured
Top notch components always selected for excelent results and trouble free long life of the furnace equipment
Up to 4 stacked quartz or SiC tube reactor chambers for various procesess
Advanced water cooling tube level system no thermal interference between different tubes
Contactless fully automated boat-in-tube loading both cantilever or softloading configurations
Maintenance friendly mechanical design
The design of atmospheric horizontal diffusion furnace combines the multiple process capability with the needs of a maximum capacity for full production system and high flexibility small scale versions for use in research and pilot production. Diffusion Furnace provides an easy-to-maintain, safe and reliable horizontal furnace platform.
The STA design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.
Diffusion Furnace Atmospheric Processes
Diffusion (drive-in) high temperature procesess
Doping from solid, liquid and gaseous dopant sources e.g.: BBr₃, B2H6, POCL₃, PH₃, BN
Various thermal processing e.g. annealing, curing, sintering
Pyrogenic Wet Oxide with External Burning System
Wet Oxide with ultra pure steamer
Dry Oxide
HiPOx (High Pressure Oxide)
DCE or HCl optional for all processes
Features and Benefits of Diffusion Furnace
State of the art modular control system, inhouse designed, highly tailored and inhouse manufactured
Top notch components always selected for excelent results and trouble free long life of the furnace equipment
Up to 4 stacked quartz or SiC tube reactor chambers for various procesess
Advanced water cooling tube level system no thermal interference between different tubes
Contactless fully automated boat-in-tube loading both cantilever or softloading configurations
Maintenance friendly mechanical design
