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Horizontal Diffusion Furnace

The design of atmospheric horizontal diffusion furnace combines the multiple process capability with the needs of a maximum capacity for full production system and high flexibility small scale versions for use in research and pilot production. Diffusion Furnace provides an easy-to-maintain, safe and reliable horizontal furnace platform.

  • product details
  • The design of atmospheric horizontal diffusion furnace combines the multiple process capability with the needs of a maximum capacity for full production system and high flexibility small scale versions for use in research and pilot production. Diffusion Furnace provides an easy-to-maintain, safe and reliable horizontal furnace platform.

     

    The STA design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.

     

    Diffusion Furnace Atmospheric Processes

    Diffusion (drive-in) high temperature procesess

    Doping from solid, liquid and gaseous dopant sources e.g.: BBr, B2H6, POCL, PH, BN

    Various thermal processing e.g. annealing, curing, sintering

    Pyrogenic Wet Oxide with External Burning System

    Wet Oxide with ultra pure steamer

    Dry Oxide

    HiPOx (High Pressure Oxide)

    DCE or HCl optional for all processes

     

    Features and Benefits of Diffusion Furnace

    State of the art modular control system, inhouse designed, highly tailored and inhouse manufactured

    Top notch components always selected for excelent results and trouble free long life of the furnace equipment

    Up to 4 stacked quartz or SiC tube reactor chambers for various procesess

    Advanced water cooling tube level system no thermal interference between different tubes

    Contactless fully automated boat-in-tube loading both cantilever or softloading configurations

    Maintenance friendly mechanical design


    The design of atmospheric horizontal diffusion furnace combines the multiple process capability with the needs of a maximum capacity for full production system and high flexibility small scale versions for use in research and pilot production. Diffusion Furnace provides an easy-to-maintain, safe and reliable horizontal furnace platform.

     

    The STA design is outstanding for high efficiency, minimised footprint and low cost of ownership while offering high process flexibility.

     

    Diffusion Furnace Atmospheric Processes

    Diffusion (drive-in) high temperature procesess

    Doping from solid, liquid and gaseous dopant sources e.g.: BBr, B2H6, POCL, PH, BN

    Various thermal processing e.g. annealing, curing, sintering

    Pyrogenic Wet Oxide with External Burning System

    Wet Oxide with ultra pure steamer

    Dry Oxide

    HiPOx (High Pressure Oxide)

    DCE or HCl optional for all processes

     

    Features and Benefits of Diffusion Furnace

    State of the art modular control system, inhouse designed, highly tailored and inhouse manufactured

    Top notch components always selected for excelent results and trouble free long life of the furnace equipment

    Up to 4 stacked quartz or SiC tube reactor chambers for various procesess

    Advanced water cooling tube level system no thermal interference between different tubes

    Contactless fully automated boat-in-tube loading both cantilever or softloading configurations

    Maintenance friendly mechanical design