Quartz wafer boats are used for wafers. The wafer carrier holds is manufactured as per customer’s size. The working temperature is 1100°C. We can supply smaller or larger Quartz wafer boats and holder as well.
Quartz wafer boats are used for wafers. The wafer carrier holds is manufactured as per customer’s size. The working temperature is 1100°C. We can supply smaller or larger Quartz wafer boats and holder as well.
The low profile quartz wafer boat is used in our Quartz Chamber plasma system. We recommend our larger chamber if you plan to use a quartz boat. we can supply larger or smaller size as requested.
Quartz wafer boats come with a carrier handle
lead time is 5-6 weeks
please confirm the thickness of your wafers so we can make the slot size to fit your requirements
Quartz wafer carriers can be used in our rebuilt other systems
this quartz carrier can be used in our rebuilt
Mechanical Property of quartz wafer boats:
Mechanical Property | Reference Value | Mechanical Property | Reference Value |
Density | 2.203g/cm3 | Refractive Index | 1.45845 |
Compressive Strength | >1100Mpa | Coefficient of thermal expansion | 5.5×10-175px/cm.°C |
Bending Strength | 67Mpa | Hot work temperature | 1750~2050°C |
Tensile Strength | 48.3Mpa | The temperature for a short time | 1300°C |
Poisson’s Ratio | 0.14~0.17 | The temperature for a long time | 1100°C |
Elastic Modulus | 71700Mpa | Resistivity | 7×107ΩNaN |
Shearing Modulus | 31000Mpa | Dielectric Strength | 250~400Kv/cm |
Moths Hardness | 5.3~6.5(Moths Scale) | Dielectric Constant | 3.7~3.9 |
Deformation Point | 1280°C | Dielectric absorption coefficient | <4×104 |
Specific Heat(20~350°C) | 670J/kg °C | Dielectric loss coefficient | <1×104 |
Thermal Conductivity(20°C) | 1.4W/m °C | ||
Use Notices of quartz wafer boats
1. Do not operate in temperature beyond quartz maximum working temperature for long time.Otherwise, products will deform crystallization or become softening.
2. Clean the quartz products before high temperature environment operation . Firstly soak the products in 10% hydrofluoric acid, then wash it with high purity water or alcohol .Operator should wear thin gloves , direct touch with the quartz glass by hand is inhibited.
3. It is wise to extend the lifespan and thermal resistance of quartz products via continuous use within high temperature environment. Otherwise, interval use shall shorten products lifespan.
4. Try to avoid touch with alkaline substances (such as water glass, asbestos, potassium and sodium compounds, etc.) when employing quartz glass product.
Quartz wafer boats are used for wafers. The wafer carrier holds is manufactured as per customer’s size. The working temperature is 1100°C. We can supply smaller or larger Quartz wafer boats and holder as well.
The low profile quartz wafer boat is used in our Quartz Chamber plasma system. We recommend our larger chamber if you plan to use a quartz boat. we can supply larger or smaller size as requested.
Quartz wafer boats come with a carrier handle
lead time is 5-6 weeks
please confirm the thickness of your wafers so we can make the slot size to fit your requirements
Quartz wafer carriers can be used in our rebuilt other systems
this quartz carrier can be used in our rebuilt
Mechanical Property of quartz wafer boats:
Mechanical Property | Reference Value | Mechanical Property | Reference Value |
Density | 2.203g/cm3 | Refractive Index | 1.45845 |
Compressive Strength | >1100Mpa | Coefficient of thermal expansion | 5.5×10-175px/cm.°C |
Bending Strength | 67Mpa | Hot work temperature | 1750~2050°C |
Tensile Strength | 48.3Mpa | The temperature for a short time | 1300°C |
Poisson’s Ratio | 0.14~0.17 | The temperature for a long time | 1100°C |
Elastic Modulus | 71700Mpa | Resistivity | 7×107ΩNaN |
Shearing Modulus | 31000Mpa | Dielectric Strength | 250~400Kv/cm |
Moths Hardness | 5.3~6.5(Moths Scale) | Dielectric Constant | 3.7~3.9 |
Deformation Point | 1280°C | Dielectric absorption coefficient | <4×104 |
Specific Heat(20~350°C) | 670J/kg °C | Dielectric loss coefficient | <1×104 |
Thermal Conductivity(20°C) | 1.4W/m °C | ||
Use Notices of quartz wafer boats
1. Do not operate in temperature beyond quartz maximum working temperature for long time.Otherwise, products will deform crystallization or become softening.
2. Clean the quartz products before high temperature environment operation . Firstly soak the products in 10% hydrofluoric acid, then wash it with high purity water or alcohol .Operator should wear thin gloves , direct touch with the quartz glass by hand is inhibited.
3. It is wise to extend the lifespan and thermal resistance of quartz products via continuous use within high temperature environment. Otherwise, interval use shall shorten products lifespan.
4. Try to avoid touch with alkaline substances (such as water glass, asbestos, potassium and sodium compounds, etc.) when employing quartz glass product.
