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Quartz wafer boats

Quartz wafer boats are used for wafers. The wafer carrier holds is manufactured as per customer’s size. The working temperature is 1100°C. We can supply smaller or larger Quartz wafer boats and holder as well.

  • product details
  • Quartz wafer boats are used for wafers. The wafer carrier holds is manufactured as per customer’s size. The working temperature is 1100°C. We can supply smaller or larger Quartz wafer boats and holder as well.

     

    The low profile quartz wafer boat is used in our Quartz Chamber plasma system.  We recommend our larger chamber if you plan to use a quartz boat. we can supply larger or smaller size as requested.

     

    Quartz wafer boats come with a carrier handle

    lead time is 5-6 weeks

    please confirm the thickness of your wafers so we can make the slot size to fit your requirements

    Quartz wafer carriers can be used in our rebuilt other systems

    this quartz carrier can be used in our rebuilt

     

    Mechanical Property of quartz wafer boats:

    Mechanical Property

    Reference Value

    Mechanical Property

    Reference Value

    Density

    2.203g/cm3

    Refractive Index

    1.45845

    Compressive Strength

    >1100Mpa

    Coefficient of thermal expansion

    5.5×10-175px/cm.°C

    Bending Strength

    67Mpa

    Hot work temperature

    1750~2050°C

    Tensile Strength

    48.3Mpa

    The temperature for a short time

    1300°C

    Poisson’s Ratio

    0.14~0.17

    The temperature for a long time

    1100°C

    Elastic Modulus

    71700Mpa

    Resistivity

    7×107ΩNaN

    Shearing Modulus

    31000Mpa

    Dielectric Strength

    250~400Kv/cm

    Moths Hardness

    5.3~6.5(Moths Scale)

    Dielectric Constant

    3.7~3.9

    Deformation Point

    1280°C

    Dielectric absorption coefficient

    <4×104

    Specific Heat(20~350°C)

    670J/kg °C

    Dielectric loss coefficient

    <1×104

    Thermal Conductivity(20°C)

    1.4W/m °C


     

    Use Notices of quartz wafer boats

    1. Do not operate in temperature beyond quartz maximum working temperature for long time.Otherwise, products will deform crystallization or become softening.

    2. Clean the quartz products before high temperature environment operation .   Firstly soak the products in 10% hydrofluoric acid, then wash it with high purity water or alcohol .Operator should wear thin gloves , direct touch with the quartz glass by hand is inhibited.

    3. It is wise to extend the lifespan and thermal resistance of quartz products via continuous use within high temperature environment. Otherwise, interval use shall shorten products lifespan.

    4. Try to avoid touch with alkaline substances (such as water glass, asbestos, potassium and sodium compounds, etc.) when employing quartz glass product.


    Quartz wafer boats are used for wafers. The wafer carrier holds is manufactured as per customer’s size. The working temperature is 1100°C. We can supply smaller or larger Quartz wafer boats and holder as well.

     

    The low profile quartz wafer boat is used in our Quartz Chamber plasma system.  We recommend our larger chamber if you plan to use a quartz boat. we can supply larger or smaller size as requested.

     

    Quartz wafer boats come with a carrier handle

    lead time is 5-6 weeks

    please confirm the thickness of your wafers so we can make the slot size to fit your requirements

    Quartz wafer carriers can be used in our rebuilt other systems

    this quartz carrier can be used in our rebuilt

     

    Mechanical Property of quartz wafer boats:

    Mechanical Property

    Reference Value

    Mechanical Property

    Reference Value

    Density

    2.203g/cm3

    Refractive Index

    1.45845

    Compressive Strength

    >1100Mpa

    Coefficient of thermal expansion

    5.5×10-175px/cm.°C

    Bending Strength

    67Mpa

    Hot work temperature

    1750~2050°C

    Tensile Strength

    48.3Mpa

    The temperature for a short time

    1300°C

    Poisson’s Ratio

    0.14~0.17

    The temperature for a long time

    1100°C

    Elastic Modulus

    71700Mpa

    Resistivity

    7×107ΩNaN

    Shearing Modulus

    31000Mpa

    Dielectric Strength

    250~400Kv/cm

    Moths Hardness

    5.3~6.5(Moths Scale)

    Dielectric Constant

    3.7~3.9

    Deformation Point

    1280°C

    Dielectric absorption coefficient

    <4×104

    Specific Heat(20~350°C)

    670J/kg °C

    Dielectric loss coefficient

    <1×104

    Thermal Conductivity(20°C)

    1.4W/m °C


     

    Use Notices of quartz wafer boats

    1. Do not operate in temperature beyond quartz maximum working temperature for long time.Otherwise, products will deform crystallization or become softening.

    2. Clean the quartz products before high temperature environment operation .   Firstly soak the products in 10% hydrofluoric acid, then wash it with high purity water or alcohol .Operator should wear thin gloves , direct touch with the quartz glass by hand is inhibited.

    3. It is wise to extend the lifespan and thermal resistance of quartz products via continuous use within high temperature environment. Otherwise, interval use shall shorten products lifespan.

    4. Try to avoid touch with alkaline substances (such as water glass, asbestos, potassium and sodium compounds, etc.) when employing quartz glass product.