Semiconductor Diffusion Heater can up to 1350°C. This diffusion cassettes is designed for high temperature diffusion furnace. This ceramic fiber heating module is built-in reinforcements to guard against element sagging at zone interfaces. The Fibrothal diffusion cassettes is end vestibules resistant to cracking and shrinking under stress
STA Semiconductor Diffusion Heater can up to 1350°C. This diffusion cassettes is designed for high temperature diffusion furnace. This ceramic fiber heating module is built-in reinforcements to guard against element sagging at zone interfaces. The Fibrothal diffusion cassettes is end vestibules resistant to cracking and shrinking under stress and high-strength ceramic interlocking separators.
Fibrothal diffusion cassettes are a 'plug and heat' solution for the production of high-quality crystalline silicon wafers for solar cells and semiconductors. The diffusion cassettes are of low mass design type with vertical or horizontal elements for operating temperatures up to 1350°C. Customized diffusion heaters for specific applications can be delivered on request.
Depending on the furnace requirements, STA can accomodate high-temperature demanding processes with our range of heating materials. Operating Temperature: 300°C -1100°C, 600°C - 1250°C, 800°C - 1350°C
Primary resistance heating element Material (horizontal & vertical): Kanthal A-1, Kanthal AMR & Kanthal APM Kanthal A-1, Kanthal AMR & Kanthal APM Kanthal APM & Kanthal APM HP
Dimensions: Flexible to application requirements, consult factory
Benefits of diffusion furnace heater
Depending on furnace requirements, both element orientations can be designed to perform consistently for extended lifetimes to reduce maintenance and replacement time. With options for Energy Savings Elements or fast cooling, Kanthal heating elements will help you maximize performance.
Applications of Fibrothal heating module
The vertical and horizontal heating elements are used in many different atmospheric and LPCVD thermal processes. This includes pyrogenic oxidation, liquid source deposition as well as silicon nitriding and polysilicon processes.
If you are looking for a diffusion heater that is not listed, please contact us.
Corporation offers direct replacements of diffusion heater elements from OEMs, such as:
Tokyo Electron (TEL): VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001
Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
Axcelis: ST-200
Silicon Valley Group (SVG): 602783-02, 602783-03
Various Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500
STA Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia. DS Fibertech Corporation also provides refurbisment and burn-in services.
STA Semiconductor Diffusion Heater can up to 1350°C. This diffusion cassettes is designed for high temperature diffusion furnace. This ceramic fiber heating module is built-in reinforcements to guard against element sagging at zone interfaces. The Fibrothal diffusion cassettes is end vestibules resistant to cracking and shrinking under stress and high-strength ceramic interlocking separators.
Fibrothal diffusion cassettes are a 'plug and heat' solution for the production of high-quality crystalline silicon wafers for solar cells and semiconductors. The diffusion cassettes are of low mass design type with vertical or horizontal elements for operating temperatures up to 1350°C. Customized diffusion heaters for specific applications can be delivered on request.
Depending on the furnace requirements, STA can accomodate high-temperature demanding processes with our range of heating materials. Operating Temperature: 300°C -1100°C, 600°C - 1250°C, 800°C - 1350°C
Primary resistance heating element Material (horizontal & vertical): Kanthal A-1, Kanthal AMR & Kanthal APM Kanthal A-1, Kanthal AMR & Kanthal APM Kanthal APM & Kanthal APM HP
Dimensions: Flexible to application requirements, consult factory
Benefits of diffusion furnace heater
Depending on furnace requirements, both element orientations can be designed to perform consistently for extended lifetimes to reduce maintenance and replacement time. With options for Energy Savings Elements or fast cooling, Kanthal heating elements will help you maximize performance.
Applications of Fibrothal heating module
The vertical and horizontal heating elements are used in many different atmospheric and LPCVD thermal processes. This includes pyrogenic oxidation, liquid source deposition as well as silicon nitriding and polysilicon processes.
If you are looking for a diffusion heater that is not listed, please contact us.
Corporation offers direct replacements of diffusion heater elements from OEMs, such as:
Tokyo Electron (TEL): VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001
Hitachi Kokusai: F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
Axcelis: ST-200
Silicon Valley Group (SVG): 602783-02, 602783-03
Various Other OEM Models: UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500
STA Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia. DS Fibertech Corporation also provides refurbisment and burn-in services.
