300W 13.56MHz Radio Frequency RF Generator for 50, 80 or 125 mm OD Tube Furnace – PECVD, 13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.
Noise | <50 dB |
Output Power | 5 -300W adjustable with ± 1% stability |
RF frequency | 13.56 MHz ±0.005% stability |
Reflection Power | 200W max. |
Matching | Automatic matching |
RF Output Port | 50 Ω, N-type, female |
Cooling | Air cooling |
Power | 208-240VAC, 50/60Hz |
Tube Size | 50, 80 or 125 mm OD please select from option bar ( larger diameter coil up to 11" diameter is available upon request ) |
300W 13.56MHz Radio Frequency RF Generator for 50, 80 or 125 mm OD Tube Furnace – PECVD, 13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.
Noise | <50 dB |
Output Power | 5 -300W adjustable with ± 1% stability |
RF frequency | 13.56 MHz ±0.005% stability |
Reflection Power | 200W max. |
Matching | Automatic matching |
RF Output Port | 50 Ω, N-type, female |
Cooling | Air cooling |
Power | 208-240VAC, 50/60Hz |
Tube Size | 50, 80 or 125 mm OD please select from option bar ( larger diameter coil up to 11" diameter is available upon request ) |
