The diffusion cassettes are main used in diffusion furnace for semiconductor, solar and crystalline silicon wafers. The max temperature of STA diffusion cassettes is 1350 °C. Compared with Kanthal diffusion cassettes, STA Diffusion Heater have a good price with same quality.
STA diffusion cassettes cover a wide range of processes, such as: Fast-cooling applications such as polyimide cure, Atmospheric oxidation, LPCVD nitride. STA Diffusion heater program includes diffusion cassettes for the manufacturing of crystalline silicon wafers used in solar and semiconductor applications.
Fibrothal diffusion cassettes are a 'plug and heat' solution for the production of high-quality crystalline silicon wafers for solar cells and semiconductors. The diffusion cassettes are of low mass design type with vertical or horizontal elements for operating temperatures up to 1350°C. Customized heaters for specific applications can be delivered on request.
Other more applications of diffusion cassettes:
The vertical and horizontal heating elements are used in many different atmospheric and LPCVD thermal processes. This includes pyrogenic oxidation, liquid source deposition as well as silicon nitriding and polysilicon processes.
